High density plasma sources : design, physics, and...

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High density plasma sources : design,...

High density plasma sources : design, physics, and performance

Name: High density plasma sources : design, physics, and performance
ISBN: 9781591240631

Oleg A Popov

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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.

카테고리:

Engineering

년:

1995

출판사:

Noyes Publications

언어:

english

페이지:

466

ISBN 10:

1591240638